| 摘要 |
Disclosed is an inline-type thermal deposition device. An inline-type thermal deposition device according to an embodiment of the present invention comprises: a substrate transferring unit formed in a chamber, and continuously transferring a flexible substrate by disposing a roll-to-roll module for supplying and collecting a flexible substrate; an unwinder formed in the chamber, and including a plurality of evaporation sources disposed in an inline type to continuously provide a deposition material to the flexible substrate through a thermal deposition method, wherein the roll-to-roll module comprises: an unwinder supplying the flexible substrate wound in a roll shape; a rewinder disposed on the unwinder to be separated, and collecting the flexible substrate in a roll shape after a deposition process is completed; and a plurality of idle rollers disposed between the unwinder and the rewinder, and coming in contact with a non-deposition region other than a deposition region, in which the deposition material of the flexible substrate is deposited, to guide transferring of the flexible substrate. |
