发明名称 半導体装置、および半導体装置の製造方法
摘要 The performances of semiconductor elements disposed in a multilayer wiring layer are improved. A semiconductor device includes: a first wire disposed in a first wiring layer; a second wire disposed in a second wiring layer stacked over the first wiring layer; a gate electrode arranged between the first wire and the second wire in the direction of stacking of the first wiring layer and the second wiring layer, and not coupled with the first wire and the second wire; a gate insulation film disposed over the side surface of the gate electrode; and a semiconductor layer disposed over the side surface of the gate electrode via the gate insulation film, and coupled with the first wire and the second wire.
申请公布号 JP5830400(B2) 申请公布日期 2015.12.09
申请号 JP20120021069 申请日期 2012.02.02
申请人 ルネサスエレクトロニクス株式会社 发明人 砂村 潤;井上 尚也;金子 貴昭
分类号 H01L29/786;H01L21/28;H01L21/336;H01L21/768;H01L21/8242;H01L21/8244;H01L21/8247;H01L23/522;H01L27/04;H01L27/10;H01L27/105;H01L27/108;H01L27/11;H01L27/115;H01L29/417;H01L29/423;H01L29/49;H01L29/78;H01L29/788;H01L29/792 主分类号 H01L29/786
代理机构 代理人
主权项
地址