| 摘要 |
PROBLEM TO BE SOLVED: To provide an encoder in which the high accuracy of position detection is obtained even when there is an error in scale and sensor alignment.SOLUTION: The encoder includes a scale 10 capable of relative movement in a first direction and a sensor 1, the sensor 1 having first read means 2 and second read means 3 for reading a first pattern 11. The encoder acquires a first position in the first direction by using an output signal from the first read means 2, acquires a second position in the first direction by using an output signal from the second read means 3, acquires the cycle of the first pattern 11 by using the first and second positions, acquires a first and a second deviation amount that is the amount of relative positional deviation of the scale to each of the first read means 2 and second read means 3 in a second direction orthogonal to the first direction, and generates position information by using the first and second positions, the cycle, and the first and second deviation amounts. |
