| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of improving the detection accuracy by measuring the horizontality between a sensor element and the lids disposed to the top and bottom of the sensor element.SOLUTION: The physical quantity sensor includes: a sensor element 5 which has a first principal plane 2, a second principal plane 3 and a side plane; a first lid 7 having a side plane, which is connected to the first principal plane 2 of the sensor element 5; and a second lid 9 side plane, which is connected to the second principal plane 3 of the sensor element 5. On the side plane of the first lid 7, the first grooves 16 and the normal line of the first principal plane 2 are formed in an identical direction. |
