RESOLUTION ENHANCEMENT TECHNIQUES BASED ON HOLOGRAPHIC IMAGING TECHNOLOGY

摘要

Systems and techniques for performing resolution enhancement on target patterns based on holographic imaging technique (HIT) are described. During operation, an electronic design automation (EDA) tool can compute an in-line hologram of the target patterns based on parameters associated with a photolithography process that is used in a semiconductor manufacturing process, wherein the semiconductor manufacturing process is to be used for printing the target patterns on a semiconductor wafer. Next, the EDA tool can determine the mask patterns based on the in-line hologram.

主权项

1. A non-transitory computer-readable storage medium storing instructions for an electronic design automation (EDA) tool that, when executed by a computer, cause the computer to perform a method to determine mask patterns so that patterns printed on a semiconductor wafer by using a semiconductor manufacturing process are substantially similar to target patterns, the method comprising:
computing an in-line hologram of the target patterns based on parameters associated with a photolithography process that is used in the semiconductor manufacturing process; and determining the mask patterns based on the in-line hologram.