发明名称 METHOD OF PRODUCING BUMPS FROM COATED METAL POWDERS AND BUMPS PRODUCED BY THE SAME
摘要 The present invention relates to a method for forming a bump using metal powder coating and the bump formed thereby, when a stacked semiconductor package is manufactured. The method for forming the bump using the metal powder coating includes a coating step of forming a metal coating layer with another different conductive metal on the surface of the fine conductive metal powder, a spreading step of spreading the coated metal powder formed in the coating step on the upper side of a first semiconductor, an aligning step of the coated metal powder aligned on the first semiconductor by an electromagnetic field, and a heat treatment step of forming a bump with the coated metal powder by applying heat to the first semiconductor and the coated metal powder.
申请公布号 KR20150129968(A) 申请公布日期 2015.11.23
申请号 KR20140056787 申请日期 2014.05.12
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 KO, YONG HO;LEE, CHANG WOO;BANG, JUNG HWAN;KIM, SANG WOO;YOO, SE HOON;KIM, JUN KI
分类号 H01L23/48;H01L21/60 主分类号 H01L23/48
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