发明名称 |
METHOD OF PRODUCING BUMPS FROM COATED METAL POWDERS AND BUMPS PRODUCED BY THE SAME |
摘要 |
The present invention relates to a method for forming a bump using metal powder coating and the bump formed thereby, when a stacked semiconductor package is manufactured. The method for forming the bump using the metal powder coating includes a coating step of forming a metal coating layer with another different conductive metal on the surface of the fine conductive metal powder, a spreading step of spreading the coated metal powder formed in the coating step on the upper side of a first semiconductor, an aligning step of the coated metal powder aligned on the first semiconductor by an electromagnetic field, and a heat treatment step of forming a bump with the coated metal powder by applying heat to the first semiconductor and the coated metal powder. |
申请公布号 |
KR20150129968(A) |
申请公布日期 |
2015.11.23 |
申请号 |
KR20140056787 |
申请日期 |
2014.05.12 |
申请人 |
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY |
发明人 |
KO, YONG HO;LEE, CHANG WOO;BANG, JUNG HWAN;KIM, SANG WOO;YOO, SE HOON;KIM, JUN KI |
分类号 |
H01L23/48;H01L21/60 |
主分类号 |
H01L23/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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