HIGH THROUGHPUT MICROSCOPY DEVICE

摘要

An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.

主权项

1. A device for measuring and/or modifying surface features of an object, the device comprising
a sample carrier having a surface for mounting the object; a reference grid plate having a surface arranged in parallel with the surface of the sample carrier, at a distance from the surface of the sample carrier; a plurality of heads that are independently movable along the reference grid plate, each head comprising a microscopic probe, the heads being located between the sample carrier and the reference grid plate; and a sensor or sensors for sensing relative positions of the heads with respect to markings on the reference grid plate; the device comprising means for exerting a force between at least one of the heads and the reference grid plate and means for switching a value of said force to seat and/or clamp the at least one of the heads on the reference grid plate.