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发明名称
垂直喷流式化学铜设备
摘要
申请公布号
TWM512028
申请公布日期
2015.11.11
申请号
TW104213005
申请日期
2015.08.12
申请人
中华精测科技股份有限公司
发明人
姚瑞家;苏永泰
分类号
C23C18/38;H05K3/42
主分类号
C23C18/38
代理机构
代理人
赖正健 台北市大安区敦化南路2段71号18楼;陈家辉 台北市大安区敦化南路2段71号18楼
主权项
一种垂直喷流式化学铜设备,其包括:一槽体;一框架,至少包括一横杆,位于该槽体上方;一印刷电路板,固定于该横杆;一摇摆模组,与该框架连接;及数个管线,每个管线包括数个喷头,设置于该槽体中。
地址
桃园市平镇区工业三路15号2楼
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