| 摘要 |
PROBLEM TO BE SOLVED: To accurately part a resin sheet.SOLUTION: A resin sheet 33 is held on an adhesive tape 32 that is stuck on a dicing ring 31, and fixed onto a table 16 of a parting device. A scribe head 27 is moved relative to the table 16, and a scribing wheel 28 is rolled on a resin sheet 33 to separate the resin sheet 33 by scribing it. Thus, since the scribing wheel is used, the resin sheet can be parted in a desired shape with high accuracy. |
