发明名称 LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE COMPRISING THE LASER DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a laser device of a concise structure which can control output light at high speed and stably.SOLUTION: A laser device LS includes: a first light source 11 that generates pulse-like laser light of a first wavelength and a second light source 12 that generates pulse-like laser light of a second wavelength; an amplifier 21 that amplifies laser light of the first and second wavelengths to output first and second amplification light; a first wavelength conversion optical element 31 that performs wavelength conversion of first amplification light to first conversion light while allowing second amplification light to pass through, a second wavelength conversion optical element 32 that performs wavelength conversion of second amplification light to second conversion light while allowing first amplification light to pass through, and a third wavelength conversion optical element 33 that generates third conversion light from first conversion light and second conversion light; and a control unit 8 that controls the actuation of the first and second light sources. The control unit 8 controls the relative output timing between laser light of the first wavelength and laser light of the second wavelength, to control overlapping of first conversion light and second conversion light in time, and control the output state of third conversion light.</p>
申请公布号 JP2015180902(A) 申请公布日期 2015.10.15
申请号 JP20120169643 申请日期 2012.07.31
申请人 NIKON CORP 发明人 TOKUHISA AKIRA
分类号 G02F1/37;G03F7/20;H01L21/027 主分类号 G02F1/37
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