发明名称 ELECTROLESS DEPOSITION OF CONTINUOUS PLATINUM LAYER USING COMPLEXED COBALT(II) METAL ION REDUCING AGENT
摘要 A solution for electroless deposition of platinum is provided. The solution comprises Co^(2+) ions, Pt^(4+) ions, and amine ligands. The solution enables electroless deposition of platinum without requiring high temperatures and high pH. The solution enables the deposition of a pure platinum layer.
申请公布号 KR20150114914(A) 申请公布日期 2015.10.13
申请号 KR20150046792 申请日期 2015.04.02
申请人 LAM RESEARCH CORPORATION 发明人 NORKUS EUGENIJUS;STANKEVICIENE INA;JAGMINIENE ALDONA;TAMASAUSKAITE TAMASIUNAITE LORETA;JOI ANIRUDDHA;DORDI YEZDI
分类号 H01L21/768 主分类号 H01L21/768
代理机构 代理人
主权项
地址