HIGH FREQUENCY POWER SUPPLY DEVICE AND HIGH FREQUENCY POWER SUPPLYING METHOD

摘要

A high frequency power supply device and power supplying method are disclosed, which can rapidly and accurately control power used for generation of plasmas. The device includes a first high frequency power supply, providing power at frequency f1, and a second high frequency power supply providing power at frequency f2 (f1>f2). The first power supply includes: a first high frequency oscillator, which excites the high frequency power at the first frequency and has a variable frequency; a first power amplification block, which amplifies the power of the high frequency oscillator; a heterodyne detection block, which performs heterodyne detection of a reflected wave; and a first control block, which receives a signal after detection of the heterodyne detection block and a traveling wave signal, and controls an oscillating frequency of the first high frequency oscillating block and an output of the first power amplification block.

主权项

1. A high frequency power supply device, at least comprising a first high frequency power supply block, which supplies a plasma processing chamber with a high frequency power at a first frequency, and a second high frequency power supply block, which supplies the plasma processing chamber with a high frequency power at a second frequency below the first frequency, wherein:
the first high frequency power supply block comprises: a first high frequency oscillating block, which excites the high frequency power at the first frequency and has a variable frequency; a first power amplification block, which receives an output of the first high frequency oscillating block and amplifies the power thereof; a first directivity coupler, which receives a reflected wave from the plasma processing chamber and a traveling wave from the first power amplification block; a first reflected wave heterodyne detection block, which performs heterodyne detection of a reflected wave signal from the first directivity coupler; and a first control block, which receives a signal after detection of the first reflected wave heterodyne detection block and a traveling wave signal from the first directivity coupler, and controls an oscillating frequency of the first high frequency oscillating block and an output level of the first power amplification block.