发明名称 AMPLITUDE MEASURING DEVICE OF CUTTING BLADE
摘要 PROBLEM TO BE SOLVED: To provide an amplitude measuring device of a cutting blade capable of precisely detecting an amplitude of a cutting blade caused by ultrasonic vibrations corresponding to a frequency of an alternating-current power applied to an ultrasonic transducer. SOLUTION: This amplitude measuring device of a cutting blade applies ultrasonic vibrations by applying an alternating-current power of a predetermined frequency to an ultrasonic vibration means arranged on a rotary spindle 42 mounted with a cutting blade 45. This device comprises an amplitude detection means 110 optically detecting amplitude of the cutting blade 45 with a light emission means 112 and a light reception means 113, a frequency variable band pass filter 120 for passing only amplitude signals in a set frequency area out of amplitude signals outputted from the amplitude detection means, and a control means 130 setting and controlling a frequency area of the frequency variable band pass filter and calculating the amplitude of the cutting blade based on the amplitude signals from the frequency variable band pass filter. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008093784(A) 申请公布日期 2008.04.24
申请号 JP20060278431 申请日期 2006.10.12
申请人 DISCO ABRASIVE SYST LTD 发明人 KUMAGAI SOSUKE
分类号 B23Q17/12;B24B1/04;B24B27/06;B24B49/12;G01B17/00;H01L21/301 主分类号 B23Q17/12
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