| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for gas flow measurement. <P>SOLUTION: In one embodiment, by using a calibration circuit for gas control, in particular, verification and/or calibration of the gas flow utilizedin back-side cooling, distribution for processing gas, distribution for purge gas, distribution for cleaning agent, distribution for carrier gas, and distribution for repair gas are performed. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
