| 摘要 |
A semiconductor device includes a semiconductor substrate formed with at least two element isolation trenches having a first opening width and a second opening width larger than the first opening width, respectively, a non-coating type silicon oxide film formed along an inner surface of each element isolation trench so as to have a film thickness equal to or larger than 23 nm, and a coating type silicon oxide film formed inside the non-coating type silicon oxide film in each element isolation trench.
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