发明名称 ALIGNER
摘要 An aligner holding the edge of a wafer and centering the wafer and aligning the angles of the notches of the wafer, comprising an infinitely rotatable mechanism not limited by a rotating range formed by eliminating cable and tubes from a rotating portion to reduce a tact time and the size thereof. A link mechanism openably operating a holding mechanism holding the wafer (1) is formed to be supported on a link mechanism drive part driving the link mechanism through a bearing (14) so that only the holding mechanism and the link mechanism can be rotated.
申请公布号 WO2006134760(A1) 申请公布日期 2006.12.21
申请号 WO2006JP310433 申请日期 2006.05.25
申请人 KABUSHIKI KAISHA YASKAWA DENKI;YOSHINO, KEISUKE;HAGIO, MITSUAKI;OSAKI, SHIN;KUSAMA, YOSHIHIRO 发明人 YOSHINO, KEISUKE;HAGIO, MITSUAKI;OSAKI, SHIN;KUSAMA, YOSHIHIRO
分类号 H01L21/68 主分类号 H01L21/68
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