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发明名称
DEVICE FOR CAUSING PARTICLES TO ADHERE
摘要
申请公布号
JPH04188646(A)
申请公布日期
1992.07.07
申请号
JP19900311560
申请日期
1990.11.19
申请人
TOSHIBA CORP
发明人
OMATA NORIKO;IMI TETSUSHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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