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发明名称
DICING APPARATUS
摘要
申请公布号
JPH05190664(A)
申请公布日期
1993.07.30
申请号
JP19920003490
申请日期
1992.01.13
申请人
NEC KYUSHU LTD
发明人
IKEGAMI TOSHIO
分类号
B28D1/24;H01L21/301;H01L21/78
主分类号
B28D1/24
代理机构
代理人
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地址
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