CLIPLESS PEDESTAL OF WAFER

摘要

The clipless pedestal for dry-etching oxide films removes clips on the pedestal of the prior art to improve the pedestal. In the pedestal having a plurality of pedestal rings for insulating the first face of the pedestal, an insulation elastormer placed over the second face for contacting with a wafer, the upper and lower clips between the rings and the elastomer and a set screw and a wafer button for securely holding the wafer, the upper and lower clips are removed to replaced by the improvement of the rings and the insulation elastomer on the inner side of the pedestal is replaced with a kapton tape.