| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus capable of preferably carrying out a series of processes on substrates even in an abnormal state where a process unit is incapable of transporting likewise a normal state. SOLUTION: The substrate treating apparatus comprises a plurality of kind-classified process sections (31, 45, 46, 47), a main transporting mechanism transporting substrates in predetermined order to the kind-classified process sections, and a control section controlling the main transporting mechanism. The kind-classified process sections each have an arbitrary number of process units (HP<SB>1</SB>, CPa<SB>1</SB>, SC<SB>1</SB>, CPb<SB>1</SB>). The control section allows the substrates to be transported one by one between respective kind-classified process sections which are successive in order at predetermined transporting cycle time intervals in the normal state. If at least one process unit is in an abnormal state of disabled transporting, scheduled serial transporting of predetermined substrates which are transported through the abnormal process unit in the normal state is interrupted and scheduled transporting of substrates which are transported not via the abnormal process unit in the normal state is carried as scheduled. COPYRIGHT: (C)2009,JPO&INPIT |
