| 摘要 |
PROBLEM TO BE SOLVED: To provide a taping IC correspondent automatic X-ray inspection system capable of continuously carrying out X-ray inspections of wrapped IC products in such the state that each IC product is wrapped by a tapelike wrapper, when carrying out an inspection of the IC product wrapped by the tapelike wrapper. SOLUTION: The system includes: an inspection body which includes an X-ray irradiation section, an inspection section and photographing section; and an image processing device for determining whether an object to be inspected is good or bad. The inspection section includes a set reel in which taping ICs are reeled, and a reel for reeling them and an X-ray exposure part, wherein the taping ICs are fed forth automatically by using an automatic pitch feed means, and ICs in their automatic pitch-feed state are sequentially irradiated with X rays and sequentially photographed, and then a plurality of inspection images are inspected by comparing with a previously set reference image by using an inspecting/comparing means, and defect-marking information is output for an unacceptable product by using a marking means. COPYRIGHT: (C)2009,JPO&INPIT
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