发明名称 Method of manufacturing a wrap around shield for a perpendicular write pole using a laminated mask
摘要 A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield that wraps around the write pole. The method allows the trailing shield to be constructed with a very well controlled trailing gap thickness and also allows the write pole to be constructed with a well controlled track width and a straight, flat trailing edge. The method includes depositing a magnetic write pole over a substrate and forming a mask structure over the write pole layer. The mask structure includes an end point detection layer that can be removed by reactive ion etching. An ion mill is performed to form a write pole by removing magnetic write pole material that is not covered by the mask layer. A layer of non-magnetic material is deposited and is ion milled to expose the end point detection layer.
申请公布号 US7562437(B2) 申请公布日期 2009.07.21
申请号 US20060412038 申请日期 2006.04.25
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 PENTEK ARON;ZHENG YI
分类号 G11B5/127;H04R31/00 主分类号 G11B5/127
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