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发明名称
PLASMA CHAMBER CATHODE AND OUTER RING MADE OF SILICON MATERIAL
摘要
申请公布号
EP2047503(A1)
申请公布日期
2009.04.15
申请号
EP20060798618
申请日期
2006.09.01
申请人
WORLDEX INDUSTRY & TRADING CO., LTD.
发明人
BAE, JONG-SIK;HUR, CHAN;CHUNG, JAE-KEUK
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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