发明名称 MOUNTING DEVICE AND MOUNTING METHOD FOR ELECTRONIC COMPONENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a mounting device capable of shortening a cycle time when a semiconductor chip is mounted on a substrate with thermoplastic resin. <P>SOLUTION: Disclosed is the mounting device for electronic component that mounts the semiconductor chip C on the substrate 47 with the thermoplastic resin 48, and the mounting device includes a mounting tool 21 having a suction unit 25 for sucking and holding the semiconductor chip and driven in vertical directions, a heater 42 heating the suction portion, and a flow passage 26 provided to the suction unit and supplying gas for cooling the thermoplastic resin when the semiconductor chip held by the suction unit by driving the mounting tool in a lowering direction is pressed against the substrate and heated to fuse the thermoplastic resin. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009076606(A) 申请公布日期 2009.04.09
申请号 JP20070243063 申请日期 2007.09.19
申请人 SHIBAURA MECHATRONICS CORP 发明人 KUSUBE YOSHIHIRO
分类号 H01L21/52;H01L21/60 主分类号 H01L21/52
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