METHOD OF GENERATING ELECTRICAL ENERGY IN AN INTEGRATED CIRCUIT, CORRESPONDING INTEGRATED CIRCUIT AND METHOD OF FABRICATION

摘要

A method of generating electrical energy in an integrated circuit that may include setting into motion a (3D) three-dimensional enclosed space in the integrated circuit. The 3D enclosed space may include a piezoelectric element and a free moving object therein. The method may also include producing the electrical energy from impact between the free moving object and the piezoelectric element during the motion.