METHOD FOR DETECTING AND RELEASING ELECTROSTATIC ATTRACTION, AND PROCESSING APPARATUS

摘要

PURPOSE: An adsorption sensing solution method and a processing device are provided to prevent a substrate from being damaged when the adsorption of the substrate is detected. CONSTITUTION: A loader(3) loads an object. A lift pin(13) lifts a substrate on the upper side of the loader. A plurality of gas holes(4) are installed on the loader. A gas supply pipe is connected to the plurality of gas holes.