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发明名称
METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
摘要
申请公布号
EP2257853(A2)
申请公布日期
2010.12.08
申请号
EP20090715092
申请日期
2009.02.24
申请人
CARL ZEISS SMS GMBH
发明人
BUDACH, MICHAEL;BRET, TRISTAN;EDINGER, KLAUS;HOFMANN, THORSTEN
分类号
G03F1/00;C23C16/04;C23C16/48;H01J37/305
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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