| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam profile monitor capable of carrying out a rapid operation with high versatility, without requiring an additional device. SOLUTION: The beam profile monitor has a beam sweep means, an aperture, a beam detection means, a trapezoidal waveform acquisition means, a beam profile acquisition means, and a beam irradiation integration profile acquisition means. Since the beam profile monitor obtains a beam profile using trapezoidal waveform mapping data, an additional device is not required. Further, since the trapezoidal waveform mapping data have small amount of information, arithmetic processing can be carried out rapidly. Furthermore, the beam profile monitor can be used in all beam systems if the beam sweep means, the aperture, and the detection system exist, thereby, it has a high versatility. COPYRIGHT: (C)2011,JPO&INPIT
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