| 摘要 |
PURPOSE: A coating liquid coating device of a large substrate is provided to prevent an irregular flow of coating liquid which overflows in a direction opposite to a moving direction of a substrate by a contact part which provides contract stress with the coating liquid. CONSTITUTION: An overflow water tank(20) has an inlet and an outlet through which a substrate passes. The overflow water tank stores supplied coating liquid. The overflow water tank coats the coating liquid on the substrate. A contact unit(30) is formed on the inlet of the overflow water tank. The contact unit contacts the top of coating liquid which overflows on the substrate. The contact unit prevents irregular diffusion of the coating liquid. |
