| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a member coated with a hard film which has adequate wear resistance and seizure resistance, is also superior in adhesiveness to a substrate and durability, and has high hardness, and to provide a method for manufacturing the same. <P>SOLUTION: The member has a chromium film functioning as an underlayer 2 formed on the substrate 1, has a plurality of chromium films and a plurality of nitrogen-containing chromium films formed on the underlayer 2 so that the chromium films functioning as stress relaxation layers 3 having an approximately same thickness of 40 nm or more and the nitrogen-containing chromium films functioning as hard layers 4 having an approximately same thickness of 250 nm or less are alternately arranged. The underlayer 2, the stress relaxation layer 3 and the hard layer 4 are continuously formed in a treatment chamber of an apparatus which sputters a chromium target therein. When the underlayer 2 and the stress relaxation layer 3 are formed, the treatment chamber is set at argon gas atmosphere, and when the hard layer 4 is formed, the treatment chamber is set at an atmosphere containing argon gas and nitrogen gas. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
