Closed cell configuration to increase channel density for sub-micron planar semiconductor power device

摘要

A semiconductor power device supported on a semiconductor substrate that includes a plurality of transistor cells, each cell has a source and a drain region disposed on opposite sides of a gate region in the semiconductor substrate. A gate electrode is formed as an electrode layer on top of the gate region for controlling an electric current transmitted between the source and the drain regions. The gate electrode layer disposed on top of the semiconductor substrate is patterned into a wave-like shaped stripes for substantially increasing an electric current conduction area between the source and drain regions across the gate.

主权项

1. A method for manufacturing a semiconductor power device supported on a semiconductor substrate comprising:
forming a gate electrode layer and patterning said gate electrode layer into wave-like shaped stripes with straight gate-stripes (GS) connected to the wave-like stripes to a gate-pad disposed on a peripheral area of the semiconductor substrate; forming a plurality of transistor cells by doping source and a drain regions in the semiconductor substrate on opposite sides of the wave-like stripes; forming a salicided layer immediately below a top surface of the semiconductor substrate in the source and drain regions between the wave-like strips as contact enhanced layer followed by forming overlaying insulation layers and opening contact openings through the insulation layers on top of the salicided layer to form source and drain contacts with a metal contact in direct contact with the salicided layer; the step of forming overlaying insulation layers further comprising a step of depositing a first insulation layer over said semiconductor device and opening a plurality of first set of contact openings through said first insulation layer followed by filling said contact openings with source metal contacts and drain metal contacts for contacting the salicided layer in said source regions respectively; depositing a first metal layer on top of said first insulation layer filling in each of the first set of contact openings and patterning said first metal layer into a plurality of metal stripes with a plurality of source metal stripes contacting said source metal contacts and a plurality of drain metal stripes contacting said drain metal contacts; and said step of patterning the first metal layer further comprising a step of patterning the first metal layer into said plurality of said first set of source and drain metal stripes with different width with a lower portion of said first set of source metal stripe wider than an upper portion of said first set of source metal stripes to reduce a lower portion source resistance and said upper portion of said source metal stripes having a narrower width to allow for greater width for an upper portion of said drain metal stripes to reduce a drain resistance in an upper portion.