发明名称 ガスバリア積層体、その製造方法、電子デバイス用部材及び電子デバイス
摘要 <p>Provided is a gas barrier laminate that can be produced inexpensively as compared with the case of using an inorganic film without requiring a complex production process, and exhibits an excellent gas barrier capability and excellent flexibility, and also provided are a method for producing the gas barrier laminate, an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member. A gas barrier laminate including a base and a gas barrier layer, the gas barrier layer being provided on the base, the gas barrier layer being obtained by implanting ions into an organosilicon compound thin film formed by a CVD method that utilizes an organosilicon compound as a deposition raw material, a method for producing the gas barrier laminate, an electronic device member that includes the gas barrier laminate, and an electronic device that includes the electronic device member are provided.</p>
申请公布号 JP5781350(B2) 申请公布日期 2015.09.24
申请号 JP20110075156 申请日期 2011.03.30
申请人 发明人
分类号 B32B9/00;C23C14/48;C23C16/42 主分类号 B32B9/00
代理机构 代理人
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