| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an impedance measuring device capable of measuring an impedance while applying a predetermined DC bias voltage to a measuring object despite the intensity of DC resistance of the measuring object. <P>SOLUTION: An impedance measuring device 1 includes: a signal source 2 for outputting AC voltage on which DC voltage is superimposed, to a DUT 90 at predetermined DC output resistance R0; a current detecting part 3 for detecting a current flowing in the DUT 90; a voltage detecting part 4 for detecting voltages at both ends of the DUT 90; and an arithmetic processing part 5 for reading outputs of the current detecting part 3 and the voltage detecting part 4 and calculating the impedance of the DUT 90. The arithmetic processing part 5 and the signal source 2 are connected in a feedback relationship for applying the predetermined DC bias voltage to the DUT 90 with only the DC voltage output from the signal source 2. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
