Optical module for guiding a radiation beam

摘要

An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.

主权项

1. An optical module, comprising:
a chamber capable of being evacuated; and a mirror in the chamber, the mirror comprising a plurality of individual mirrors, each individual mirror comprising:
a mirror body including a reflection face;a support structure; anda thermally conductive portion that mechanically connects the support structure to the mirror body, wherein:
for at least one individual mirror, the thermally conductive portion comprises a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure;for at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom;for at least some of the thermally conductive portions, the thermally conductive portion includes an inner connection portion and an outer connection portion, the inner connection portion including a connection transition with the support body or the mirror body, and the outer connection portion including a connection transition with the support body or the mirror body;the thermally conductive strips are arranged so that a plurality of the thermally conductive strips follow each other on a radius between the inner connection portion and the outer connection portion;the reflection faces complement each other to provide an overall mirror reflection face; andthe optical module is configured to guide a radiation beam.