Robot systems, apparatus, and methods having independently rotatable waists

摘要

Electronic device processing systems and robot apparatus are described. The systems and apparatus are adapted to efficiently pick or place substrates into twin chambers by having independently rotatable first and second booms, and independently rotatable first and second upper arms, wherein each upper arm has a forearm, a wrist member, and an end effector adapted to carry a substrate coupled thereto. The boom members and upper arms are driven through co-axial drive shafts in some embodiments. Co-axial and non-coaxial drive motors are disclosed. Methods of operating the robot apparatus and processing systems are provided, as are numerous other aspects.

主权项

1. A robot apparatus, comprising:
a first boom adapted to rotate about a first rotational axis; a first upper arm coupled to the first boom at a position offset from the first rotational axis, the first upper arm independently rotatable about a second rotational axis relative to the first boom; a first forearm coupled to and adapted for rotation relative to the first upper arm about a third rotational axis at a position offset from the second rotational axis; a first forearm drive assembly having a first forearm driving member rigidly coupled to the first boom; a first wrist member coupled to and adapted for rotation relative to the first forearm about a fourth rotational axis at a position offset from the third rotational axis, the first wrist member adapted to couple to a first end effector; and a second boom positioned above the first boom and adapted to rotate about the first rotational axis independent of the first boom; a second upper arm coupled to the second boom at a position offset from the first rotational axis, the second upper arm independently rotatable about a fifth rotational axis relative to the second boom; a second forearm coupled to and adapted for rotation relative to the second upper arm about a sixth rotational axis at a position offset from the fifth rotational axis; a second forearm drive assembly having a second forearm driving member rigidly coupled to the second boom; and a second wrist member coupled to and adapted for rotation relative to the second forearm about an seventh rotational axis at a position offset from the sixth rotational axis, the second wrist member adapted to couple to a second end effector, wherein the first end effector and the second end effector are offset horizontally from each other in a horizontal direction and configured and adapted to be inserted into and service adjacent, side-by-side twin chambers by being extendable in generally parallel longitudinal directions orthogonal to the horizontal direction.