发明名称 |
Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric device |
摘要 |
There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium. |
申请公布号 |
US9114613(B2) |
申请公布日期 |
2015.08.25 |
申请号 |
US201414546595 |
申请日期 |
2014.11.18 |
申请人 |
Seiko Epson Corporation |
发明人 |
Shimizu Toshihiro;Ito Hiroshi;Kato Jiro;Hirai Eiju |
分类号 |
B41J2/045;B41J2/14;H01L41/047;B41J2/16;H01L27/20;H01L41/09 |
主分类号 |
B41J2/045 |
代理机构 |
Workman Nydegger |
代理人 |
Workman Nydegger |
主权项 |
1. A piezoelectric device comprising:
a first electrode; a piezoelectric layer that is formed above the first electrode; a second electrode that is formed above the piezoelectric layer; a coating layer that is formed above the second electrode consisting of titanium, and a lead electrode that is formed on the piezoelectric layer so as to be electrically connected to the first electrode, the lead electrode containing nickel and chromium, wherein the first electrode and the second electrode form a rectangular overlap region in which the first electrode overlaps the second electrode in a plan view, the first electrode defining a long side of the overlap region and the second electrode defining a short side of the overlap region, the overlap region having a pair of first regions and having a second region, the pair of the first regions being positioned adjacent to a pair of the short sides, and the second region being positioned between the pair of the first regions, wherein the coating layer is formed at least in the first regions so as to avoid the second region of the overlap regions. |
地址 |
Tokyo JP |