| 摘要 |
A spectral characteristics measurement device according to the present invention includes: an incident optical system that causes measurement light emitted from each of a plurality of measurement points inside of an object to be measured to enter a reflection surface of a fixed reflection unit and a reflection surface of a movable reflection unit; an imaging optical system that introduces fixed reflected measurement light reflected by the reflection surface of the fixed reflection unit and movable reflected measurement light reflected by the reflection surface of the movable reflection unit to the same point and forms interference light of the two reflected measurement lights; a light detection unit including a plurality of pixels for detecting an intensity of the interference light; a transmission filter that is arranged on an optical path between the imaging optical system and the light detection unit and includes a plurality of regions having different transmittances, the filter being configured such that the fixed reflected measurement light and the movable reflected measurement light that form the interference light that enters each pixel of the light detection unit are transmitted through the same region; and an arithmetic processing unit that obtains an interferogram of the measurement light from a detection signal of each pixel of the light detection unit when the movable reflection unit is moved, and obtains a spectrum of the measurement light based on the interferogram. |
