| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a low-cost semiconductor device inspection device and an inspection method thereof, in which surge voltage resistance can be inspected with a small deviation voltage of a discharge voltage and with high accuracy.SOLUTION: An inspection device 100 includes: a first main electrode 17, a second main electrode 19, and an auxiliary electrode 20; and a suction device 21. A ratio of the respective curvature radiuses r1, r2, and r3 of spherical surfaces of tips of the electrodes 17, 19, and 20, and a positional relation between the electrodes are set to predetermined values. Thus, a low-cost semiconductor device inspection device and an inspection method thereof, in which surge voltage resistance can be inspected with a small deviation voltage of a discharge voltage and with high accuracy, can be provided.</p> |
