SUBSTRATE COLLECTING DEVICE

摘要

The present invention provides a substrate collecting device that includes a first stage on which a sheet is placed with a plurality of substrates facing downward, an sampler which carries out a predetermined operation on some of the substrates, which are disposed at predetermined positions, from above the first stage thereby to cause the substrates to come off from the sheet and fall, an optical system and a collector disposed below the first stage, and a second stage, which integrally moves the optical system and the collector in a horizontal direction. The second stage is capable of positioning the optical system and the collector at two positions at which the optical system or the collector is disposed substantially vertically below a predetermined position.

主权项

1. A substrate collecting device, comprising:
a first stage configured to move in a horizontal direction, the stage capable of holding a sheet, the sheet comprising a first surface and a plurality of substrates on a second surface; an optical system that observes one or more of the plurality of substrates on the stage; a collector that collects one or more of the plurality of substrates that is removed from the sheet; and a second stage that is capable of moving the optical system and the collector in the horizontal direction, wherein the second stage is configured to have a first position and a second position, the first position is such that the optical system is substantially vertically away from the second surface of the sheet and the second position is such that the collector is substantially vertically away from the second surface of the sheet.