发明名称 ANTI-SLIP END-EFFECTOR FOR TRANSPORTING WORKPIECE
摘要 An anti-slip end-effector for transporting a workpiece, which is configured to be attached to a robotic arm, includes: a workpiece-supporting area for placing a workpiece thereon for transportation; at least one front protrusion disposed at a distal end of the workpiece-supporting area for engaging an edge of the workpiece to restrict movement of the workpiece placed on the workpiece-supporting area beyond the front protrusion; and at least one anti-slip protrusion disposed in the workpiece-supporting area for contacting and supporting the backside of the workpiece, said anti-slip protrusion having a top face having a static friction coefficient of 1.0 or more as measured against the backside of the workpiece, and having a surface roughness of less than 0.4 μm.
申请公布号 US2015217456(A1) 申请公布日期 2015.08.06
申请号 US201414172220 申请日期 2014.02.04
申请人 ASM IP Holding B.V. 发明人 Tsuji Naoto;Yamagishi Takayuki
分类号 B25J15/00;H01L21/677;B25J11/00 主分类号 B25J15/00
代理机构 代理人
主权项 1. An anti-slip end-effector for transporting a workpiece, configured to be attached to a robotic arm and comprising: a workpiece-supporting area for placing a workpiece thereon for transportation, said workpiece having a backside having a glossy finish; and at least one anti-slip protrusion disposed in the workpiece-supporting area for contacting and supporting the backside of the workpiece, said anti-slip protrusion having a top face having a static friction coefficient of 1.0 or more as measured against the backside of the workpiece, and having a surface roughness of less than 0.4 μm.
地址 Almere NL