VIBRATING ELEMENT, VIBRATOR, OSCILLATOR, AND ELECTRONIC DEVICE

摘要

A vibrating element includes a piezoelectric substrate having an excitation section adapted to excite a thickness-shear vibration, and provided with a step section in each of side surfaces on both ends, and a peripheral section having a thickness smaller than a thickness of the excitation section, and the peripheral section has at least one projection section disposed on both principal surfaces in an area where a vibratory displacement when the excitation section excites a vibration is sufficiently attenuated.

主权项

1. A piezoelectric vibrating element, comprising:
a piezoelectric substrate; and excitation electrodes disposed respectively on principal surfaces of the piezoelectric substrate;
the piezoelectric substrate having (i) an excitation section; and (ii) a peripheral section, a thickness of the peripheral section being smaller than a thickness of the excitation section, the peripheral section being integrally arranged along a periphery of the excitation section;the excitation section having (i) a first section that is at a location of a maximum thickness of the excitation section, and (ii) side surfaces between a principal surface of the first section and a principal surface of the peripheral section;each of the side surfaces having (i) a stepped section having a step, and (ii) a non-stepped plane from the principal surface of the first section to the principal surface of the peripheral section;the stepped sections being arranged at two locations sandwiching the first section, with the principal surface of the first section seen in plan view; andthe non-stepped planes being arranged along a direction in which the two locations are aligned, and are connected to the stepped sections; and at least one projection section that projects from the peripheral section along a thickness direction.