| 摘要 |
<p>PROBLEM TO BE SOLVED: To eliminate a cause of nozzle clogging which is practically difficult to eliminate in the conventional shut down processing.SOLUTION: In the shut down processing, in its drying step, a solvent stop valve 254 is closed while a solvent valve 356 is opened, and an air valve 374 is opened. Thereby, air is sucked from an ASC nozzle (cleaning nozzle) 370. The air sucked from the ASC nozzle 370 passes through an air suction path 372 which is a solvent path, then passes through the solvent valve 356, and enters a supply path 350. The upstream side of the supply path 350 is substantially in an atmospheric air release state. In this drying step, because an open state of a suction valve 358 is maintained, suction by a suction pump 212 is continued.</p> |
