| 摘要 |
PROBLEM TO BE SOLVED: To suppress heating generated in a switch of a DC/RF conversion part by preventing an increase in a loss generated in the switch, and to miniaturize a heat sink for radiating heat from the switch.SOLUTION: The high frequency power supply device includes: a DC/RF conversion part 5 for converting the DC output of a variable DC power supply part 4 into a high frequency output; and a control part 8 having an output control part 9 for controlling the variable DC power supply part 4 and a drive signal supply circuit 10 for supplying a drive signal to a switch configuring a switching circuit 5A of the DC/RF conversion part 5. The drive signal supply circuit 10 includes: an inter-control terminal voltage detection part 10C for detecting a voltage between the control terminals of each switch of the switching circuit 5A and an inter-control terminal voltage control part 10E for performing control to maintain a voltage to be detected by the inter-control terminal voltage detection part 10C at a target value. Thus, it is possible to prevent an increase in a conduction loss generated in each switch by performing control to maintain the inter-control terminal voltage of each switch of the switching circuit 5A at the target value. |
