Electronic device, method for manufacturing the same and touch panel including the same

摘要

Provided are an electronic device, a method of manufacturing the same, and a touch panel including the device. The electronic device includes a nanostructure having a plurality of metal oxide nanorods vertically aligned at predetermined intervals in intersection regions between bottom electrodes and top electrodes that perpendicularly cross each other. The nanorods are formed to the same diameter and the same height so that the electronic device can exhibit uniform performance. Also, a method of manufacturing an electronic device includes selectively vertically growing the same number of metal oxide nanostructures with a uniform size only on the bottom electrodes using a nano-template with a plurality of vertical holes. Furthermore, a touch panel includes a nanostructure having a plurality of piezoelectric nanorods disposed in a plurality of touch cells arranged in a matrix.

主权项

1. A method of manufacturing an electronic device, comprising:
forming a plurality of bottom electrodes arranged on a substrate parallel to one another; forming a metal oxide seed layer on the entire surface of the substrate having the bottom electrodes; forming a nano-template having a plurality of vertical holes on the metal oxide seed layer; forming metal oxide nanostructures on the bottom electrodes in a vertical direction with respect to the substrate by growing the metal oxide seed layer exposed through the vertical holes of the nano-template; and forming top electrodes on the metal oxide nanostructures for perpendicularly intersecting the bottom electrode, wherein the plurality of vertical holes are placed on the bottom electrodes periodically, wherein the metal oxide nanostructures are formed in intersection regions between the bottom electrodes and the top electrodes.