Microphone with aligned apertures

摘要

A MEMS microphone has a backplate with a given backplate aperture, and a diaphragm having a diaphragm aperture. The given backplate aperture is substantially aligned with the diaphragm aperture.

主权项

1. A MEMS microphone comprising:
a stationary support forming a backside cavity; a backplate having a plurality of backplate apertures including a first set of backplate apertures and a second set of backplate apertures, the first set of backplate apertures forming slots and the second set of backplate apertures forming round holes, the first set of backplate apertures positioned generally at the outer perimeter of the backplate and the second set of backplate apertures positioned generally toward the center of the backplate, the backplate being stationary relative to the stationary support; and a diaphragm having a plurality of apertures, each aperture forming a slot, the diaphragm forming a variable capacitor with the backplate and having an off-center diaphragm aperture, at least one of the plurality of backplate apertures being aligned with the off-center diaphragm aperture to form a straight, unobstructed vertical channel that extends through the backside cavity.