发明名称 接着剤層付き半導体チップの製造方法及び半導体装置の製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laminated sheet for semiconductor, capable of easily forming a semiconductor chip with adhesive layer which includes an adhesive layer having a shape suitable for mounting of a semiconductor chip. <P>SOLUTION: The laminated sheet 100 for semiconductor includes: a pressure-sensitive adhesive film 120 and an adhesive film 110 adhered to the pressure-sensitive adhesive film 120. The adhesive film 110 contains a thermoplastic resin having an imido framework, a photo-curable resin and a photo-radical generator, and the pressure-sensitive adhesive film 120 contains an acrylic copolymer and a photo-radical generator. The glass transition temperature of the thermoplastic resin is 10°C or higher, and the glass transition temperature of the acrylic copolymer is 0°C or lower. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5742501(B2) 申请公布日期 2015.07.01
申请号 JP20110135614 申请日期 2011.06.17
申请人 发明人
分类号 H01L21/52;C09J4/00;C09J7/02;C09J11/06;C09J133/00;C09J179/08;H01L21/301;H01L21/683 主分类号 H01L21/52
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