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发明名称
磁阻效应元件之制造方法及制造系统
摘要
提供一种磁阻效应元件之制造方法及制造系统,可实现磁阻效应元件的进一步之微细化、亦即积体度的进一步之增大,同时可制造具有高磁性的磁阻效应元件。具有:于基板上,准备具备前述二个磁性层的其中一层、构成前述穿隧势垒层之层、及前述二个磁性层的另一层之积层体的程序;将前述积层体藉蚀刻而分离成复数个,于前述基板上形成经分离之复数个积层体的程序;对于前述经分离的复数个积层体之侧部在可减压的处理腔室内照射离子束之程序;以及前述离子束的照射后,对于前述处理腔室内导入氧化性气体或氮化性气体,于前述复数个积层体之表面形成氧化层或氮化层的程序。
申请公布号
TW201526321
申请公布日期
2015.07.01
申请号
TW103129887
申请日期
2014.08.29
申请人
佳能安内华股份有限公司 CANON ANELVA CORPORATION
发明人
林真理恵 HAYASHI, MARIE;坂本清尚 SAKAMOTO, KIYOTAKA;池田真义 IKEDA, MASAYOSHI
分类号
H01L43/12(2006.01);H01L21/3065(2006.01)
主分类号
H01L43/12(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本 JP
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