发明名称 |
ELECTROSTATIC CHUCK WITH PHOTO-PATTERNABLE SOFT PROTRUSION CONTACT SURFACE |
摘要 |
<p>In accordance with an embodiment of the invention, there is provided a soft protrusion structure for an electrostatic chuck, which offers a non-abrasive contact surface for wafers, workpieces or other substrates, while also having improved manufacturability and compatibility with grounded surface platen designs. The soft protrusion structure comprises a photo-patternable polymer.</p> |
申请公布号 |
SG11201503454Q(A) |
申请公布日期 |
2015.06.29 |
申请号 |
SG11201503454Q |
申请日期 |
2013.10.29 |
申请人 |
ENTEGRIS, INC. |
发明人 |
LIN, I-KUAN;COOKE, RICHARD, A.;RYBCZYNSKI, JAKUB |
分类号 |
H01L21/683;H01L21/687 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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