发明名称 OUTPUT VOLTAGE VARIABLE DEVICE FOR SEMICONDUCTOR CHILLER EQUIPMENT AND CONTROLLING METHOD FOR THE SAMEE
摘要 <p>The present invention provides an output voltage variable device for semiconductor chiller equipment and a controlling method for the same. The output voltage variable device for the semiconductor chiller equipment comprises: a thermoelectric module installed around semiconductor manufacture equipment, which controls the temperature by variably cooling or variably heating a wafer in a chamber or the periphery thereof through a heat moving line; a controller for controlling a removal function for residual voltage or current remaining in the thermoelectric module by including a variable cooling or variable heating function of the thermoelectric module; a polar converting unit for converting a power polar from (+) to (-) or from (-) to (+), so the thermoelectric module is operated with the variable cooling or variable heating function according to a variable switching control signal of the controller; a rectifying unit for rectifying and supplying supply voltage supplied to the thermoelectric module via the polar converting unit according to the variable switching control signal of the controller; and a variable switching unit for varying the supply voltage applied to the rectifying unit according to the variable switching control signal of the controller within fixed parameters. The present invention as explained above, included in chiller equipment of a semiconductor manufacture process, has an effect that, by stably controlling the adjacent temperature at the time of manufacturing a semiconductor through varying output voltage, even if a polar conversion is instantaneously made in the chiller equipment for the semiconductor, the temperature is exactly maintained to safely operate the thermoelectric module in an optimum state, and accordingly, the quality of the chiller equipment for the semiconductor is maximized.</p>
申请公布号 KR20150068188(A) 申请公布日期 2015.06.19
申请号 KR20130154098 申请日期 2013.12.11
申请人 POWERNICS. CO., LTD. 发明人 HWANG, KYU WON;KIM, DONG YEON
分类号 H01L21/02 主分类号 H01L21/02
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