VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD OF MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus, a vapor deposition method, and a method of manufacturing an organic electroluminescent element such that an influence of contamination can be reduced.SOLUTION: There is provided a vapor deposition apparatus that deposits a film on a substrate, and the vapor deposition apparatus includes: a vapor deposition unit including a vapor deposition chamber and a vapor deposition mask provided with an opening for pattern formation; and a conveyance mechanism which can move at least one of the substrate and vapor deposition unit relatively to the other in a first direction orthogonal to a normal direction of the vapor deposition mask, and stop the substrate temporarily at a stationary position for the vapor deposition unit. When the substrate is at the stationary position, a vapor deposited region of the substrate does not overlap the opening of the vapor deposition mask, and the vapor deposition chamber is provided with a first exhaust port and a second exhaust port. When the substrate is at the stationary position, at least a part of the second exhaust port is located below the substrate when viewed along a second direction orthogonal to the normal direction and the first direction.